Fabrication and characterization of Si_1−xGe_x nanocrystals in as-grown and annealed structures: a comparative study

• Muhammad Taha Sultan,
• Adrian Valentin Maraloiu,
• Ionel Stavarache,
• Jón Tómas Gudmundsson,
• Andrei Manolescu,
• Valentin Serban Teodorescu,
• Magdalena Lidia Ciurea and
• Halldór Gudfinnur Svavarsson

Beilstein J. Nanotechnol. 2019, 10, 1873–1882, doi:10.3762/bjnano.10.182

• consequential interface characteristics and its effect on the photocurrent spectra. Keywords: grazing incidence XRD (GIXRD); high-power impulse magnetron sputtering (HiPIMS); HRTEM; magnetron sputtering; photocurrent spectra; SiGe nanocrystals in SiO2/SiGe/SiO2 multilayers; STEM-HAADF; TEM; Introduction

• grazing incidence XRD (GIXRD) and X-ray reflectometry (XRR) via Philips X'pert diffractometer (Cu Kα, 0.15406 nm, precision of 0.00001°) and Jeol ARM 200F transmission electron microscopy (TEM). For the X-ray diffraction scans, a 2×Ge(220) asymmetrical hybrid monochromator utilizing line focus, with a 1/4